Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6950780 | Database interpolation method for optical measurement of diffractive microstructures | Kenneth C. Johnson | 2005-09-27 |
| 6919958 | Wafer metrology apparatus and method | Clinton Carlisle, Hung Pham, Edric Tong, Douglas E. Ruth, James Cahill +3 more | 2005-07-19 |
| 6909507 | Polarimetric scatterometry methods for critical dimension measurements of periodic structures | Adam E. Norton, Abdurrahman Sezginer | 2005-06-21 |
| 6870617 | Accurate small-spot spectrometry systems and methods | Adam E. Norton, Abdurrahman Sezginer, Rodney Smedt | 2005-03-22 |
| 6850333 | Optimized aperture shape for optical CD/profile metrology | Kenneth C. Johnson | 2005-02-01 |