Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6919958 | Wafer metrology apparatus and method | Fred E. Stanke, Clinton Carlisle, Hung Pham, Edric Tong, Douglas E. Ruth +3 more | 2005-07-19 |
| 6909507 | Polarimetric scatterometry methods for critical dimension measurements of periodic structures | Abdurrahman Sezginer, Fred E. Stanke | 2005-06-21 |
| 6870617 | Accurate small-spot spectrometry systems and methods | Abdurrahman Sezginer, Fred E. Stanke, Rodney Smedt | 2005-03-22 |