Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6950780 | Database interpolation method for optical measurement of diffractive microstructures | Fred E. Stanke | 2005-09-27 |
| 6947135 | Reduced multicubic database interpolation method for optical measurement of diffractive microstructures | — | 2005-09-20 |
| 6850333 | Optimized aperture shape for optical CD/profile metrology | Fred E. Stanke | 2005-02-01 |