Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6903011 | Displacement method to grow cu overburden | Chi-Wen Liu | 2005-06-07 |
| 6903019 | CMP process leaving no residual oxide layer or slurry particles | Shih-Chi Lin, Yi-Lung Cheng, Chi-Wen Liu, Ming-Hua Yoo, Wen-Kung Cheng +1 more | 2005-06-07 |
| 6863491 | Catch-pin water support for process chamber | Hsi-Kuei Cheng, Chun-Tse Lin, Ting-Chun Wang, Yu-Ku Lin | 2005-03-08 |