Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979656 | Carbon and halogen doped silicate glass dielectric layer and method for fabricating the same | Shiu-Ko JangJian, Jun Wu, Chi-Wen Liu, Ying-Lung Wang, Michael Chang +1 more | 2005-12-27 |
| 6903019 | CMP process leaving no residual oxide layer or slurry particles | Ying-Lang Wang, Shih-Chi Lin, Chi-Wen Liu, Ming-Hua Yoo, Wen-Kung Cheng +1 more | 2005-06-07 |