Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6973636 | Method of defining forbidden pitches for a lithography exposure tool | Jaw-Jung Shin, Chun-Kuang Chen, Burn Jeng Lin, Li-Chun Tien, Mi-Chang Chang +4 more | 2005-12-06 |
| 6877152 | Method of inter-field critical dimension control | Anthony Yen, Burn Jeng Lin | 2005-04-05 |