Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6973636 | Method of defining forbidden pitches for a lithography exposure tool | Chun-Kuang Chen, Tsai-Sheng Gau, Burn Jeng Lin, Li-Chun Tien, Mi-Chang Chang +4 more | 2005-12-06 |
| 6861179 | Charge effect and electrostatic damage prevention method on photo-mask | Ren-Guey Hsieh, Chang-Cheng Hung | 2005-03-01 |