Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6973636 | Method of defining forbidden pitches for a lithography exposure tool | Jaw-Jung Shin, Chun-Kuang Chen, Tsai-Sheng Gau, Li-Chun Tien, Mi-Chang Chang +4 more | 2005-12-06 |
| 6934008 | Multiple mask step and scan aligner | — | 2005-08-23 |
| 6929887 | Printable assist lines and the removal of such | Ru-Gyn Liu, Gue-Wuu Hwang | 2005-08-16 |
| 6897455 | Apparatus and method for repairing resist latent images | — | 2005-05-24 |
| 6877152 | Method of inter-field critical dimension control | Tsai-Sheng Gau, Anthony Yen | 2005-04-05 |