Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6884728 | Method for removing polymeric residue contamination on semiconductor feature sidewalls | Jun-Lung Huang, Jen-Cheng Liu, Ching-Hui Ma, Yi-Chen Huang, Yin-Shen Chu +1 more | 2005-04-26 |