Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6972258 | Method for selectively controlling damascene CD bias | Hung-Ming Chen | 2005-12-06 |
| 6884728 | Method for removing polymeric residue contamination on semiconductor feature sidewalls | Jun-Lung Huang, Jen-Cheng Liu, Ching-Hui Ma, Yi-Chen Huang, Hong-Ming Chen +1 more | 2005-04-26 |