Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6899787 | Plasma processing apparatus and plasma processing system with reduced feeding loss, and method for stabilizing the apparatus and system | Akira Nakano, Shintaro Asuke, Tadahiro Ohmi | 2005-05-31 |
| 6879884 | Energy evaluation support system, program, information storage medium, and energy evaluation support method | Yoshitake Kobayashi, Junichi Takeuchi | 2005-04-12 |