Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6954033 | Plasma processing apparatus | Tadashi Kumagai, Tadahiro Ohmi | 2005-10-11 |
| 6899787 | Plasma processing apparatus and plasma processing system with reduced feeding loss, and method for stabilizing the apparatus and system | Shintaro Asuke, Takeshi Miyashita, Tadahiro Ohmi | 2005-05-31 |
| 6871111 | Performance evaluation method for plasma processing apparatus | Tadahiro Ohmi | 2005-03-22 |