Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6899787 | Plasma processing apparatus and plasma processing system with reduced feeding loss, and method for stabilizing the apparatus and system | Akira Nakano, Takeshi Miyashita, Tadahiro Ohmi | 2005-05-31 |