Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6927077 | Method and apparatus for measuring contamination of a semiconductor substrate | Tae-Min Eom, Kwan-Woo Ryu, Park-Song Kim, Sang-Mun Chon, Sun-Yong Choi +1 more | 2005-08-09 |
| 6911662 | Chemical-mechanical polishing apparatus and method for controlling the same | Kyoung Woo Kim | 2005-06-28 |
| 6869215 | Method and apparatus for detecting contaminants in ion-implanted wafer | Sang-Mun Chon, Sun-Yong Choi, Chung-Sam Jun, Kwan-Woo Ryu, Park-Song Kim +1 more | 2005-03-22 |
| 6870948 | Method and apparatus for numerically analyzing grain growth on semiconductor wafer using SEM image | Chung-Sam Jun, Sang-Mun Chon, Sang-bong Choi, Kye-Weon Kim, Sang Hoon Lee +2 more | 2005-03-22 |
| 6850332 | Method for measuring step difference in a semiconductor device and apparatus for performing the same | Chung-Sam Jun, Kye-Weon Kim, Hyo-Hoo Kim | 2005-02-01 |