Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6927077 | Method and apparatus for measuring contamination of a semiconductor substrate | Tae-Min Eom, Yu-Sin Yang, Kwan-Woo Ryu, Park-Song Kim, Sang-Mun Chon +1 more | 2005-08-09 |
| 6869215 | Method and apparatus for detecting contaminants in ion-implanted wafer | Yu-Sin Yang, Sang-Mun Chon, Sun-Yong Choi, Kwan-Woo Ryu, Park-Song Kim +1 more | 2005-03-22 |
| 6870948 | Method and apparatus for numerically analyzing grain growth on semiconductor wafer using SEM image | Sang-Mun Chon, Sang-bong Choi, Kye-Weon Kim, Sang Hoon Lee, Yu-Sin Yang +2 more | 2005-03-22 |
| 6850332 | Method for measuring step difference in a semiconductor device and apparatus for performing the same | Kye-Weon Kim, Yu-Sin Yang, Hyo-Hoo Kim | 2005-02-01 |