Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6927077 | Method and apparatus for measuring contamination of a semiconductor substrate | Tae-Min Eom, Yu-Sin Yang, Park-Song Kim, Sang-Mun Chon, Sun-Yong Choi +1 more | 2005-08-09 |
| 6869215 | Method and apparatus for detecting contaminants in ion-implanted wafer | Yu-Sin Yang, Sang-Mun Chon, Sun-Yong Choi, Chung-Sam Jun, Park-Song Kim +1 more | 2005-03-22 |