Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6912056 | Apparatus and method for measuring each thickness of a multilayer stacked on a substrate | Pil-Sik Hyun, Sun-Jin Kang, Kyung-Ho Jung | 2005-06-28 |
| 6870948 | Method and apparatus for numerically analyzing grain growth on semiconductor wafer using SEM image | Chung-Sam Jun, Sang-Mun Chon, Sang-bong Choi, Kye-Weon Kim, Sang Hoon Lee +2 more | 2005-03-22 |