Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6933245 | Method of forming a thin film with a low hydrogen content on a semiconductor device | Seung Hwan Lee | 2005-08-23 |
| 6858533 | Semiconductor device having an etch stopper formed of a sin layer by low temperature ALD and method of fabricating the same | Kang-soo Chu, J o-won Lee, Jae-Eun Park | 2005-02-22 |