Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6936764 | Three dimensional dynamically shielded high-Q BEOL metallization | Robert A. Groves | 2005-08-30 |
| 6858533 | Semiconductor device having an etch stopper formed of a sin layer by low temperature ALD and method of fabricating the same | Kang-soo Chu, J o-won Lee, Jong-ho Yang | 2005-02-22 |