Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6858533 | Semiconductor device having an etch stopper formed of a sin layer by low temperature ALD and method of fabricating the same | Kang-soo Chu, Jae-Eun Park, Jong-ho Yang | 2005-02-22 |