Issued Patents 2005
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6980349 | Micromirrors with novel mirror plates | Andrew Huibers | 2005-12-27 |
| 6980347 | Micromirror having reduced space between hinge and mirror plate of the micromirror | Andrew Huibers | 2005-12-27 |
| 6972891 | Micromirror having reduced space between hinge and mirror plate of the micromirror | Andrew Huibers | 2005-12-06 |
| 6970281 | Micromirror array having reduced gap between adjacent micromirrors of the micromirror array | Andrew Huibers | 2005-11-29 |
| 6970280 | High angle micro-mirrors and processes | Andrew Huibers, Peter Heureux | 2005-11-29 |
| 6969635 | Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates | Andrew Huibers, Steven S. Chiang | 2005-11-29 |
| 6965468 | Micromirror array having reduced gap between adjacent micromirrors of the micromirror array | Andrew Huibers | 2005-11-15 |
| 6960305 | Methods for forming and releasing microelectromechanical structures | Jonathan Doan, Andrew Huibers, Jason Reid | 2005-11-01 |
| 6952302 | Hinge structures for micro-mirror arrays | Jonathan Doan, Robert M. Duboc, Jr. | 2005-10-04 |
| 6950223 | Multiple hinge MEMS device | Andrew Huibers | 2005-09-27 |
| 6949202 | Apparatus and method for flow of process gas in an ultra-clean environment | Gregory P. Schaadt, Douglas B. MacDonald, Niles K. MacDonald | 2005-09-27 |
| 6942811 | Method for achieving improved selectivity in an etching process | Gregory P. Schaadt, Douglas B. MacDonald, Hongqin Shi | 2005-09-13 |
| 6913942 | Sacrificial layers for use in fabrications of microelectromechanical devices | Jonathan Doan | 2005-07-05 |
| 6906847 | Spatial light modulators with light blocking/absorbing areas | Andrew Huibers | 2005-06-14 |
| 6900072 | Method for making a micromechanical device by using a sacrificial substrate | Andrew Huibers | 2005-05-31 |
| 6885494 | High angle micro-mirrors and processes | Andrew Huibers, Peter Heureux | 2005-04-26 |
| 6873450 | Micromirrors with mechanisms for enhancing coupling of the micromirrors with electrostatic fields | Andrew Huibers | 2005-03-29 |
| 6867897 | Micromirrors and off-diagonal hinge structures for micromirror arrays in projection displays | Andrew Huibers | 2005-03-15 |
| 6849471 | Barrier layers for microelectromechanical systems | Jonathan Doan | 2005-02-01 |
| 6844959 | Spatial light modulators with light absorbing areas | Andrew Huibers, Robert M. Duboc, Jr. | 2005-01-18 |