Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6949202 | Apparatus and method for flow of process gas in an ultra-clean environment | Satyadev Patel, Douglas B. MacDonald, Niles K. MacDonald | 2005-09-27 |
| 6942811 | Method for achieving improved selectivity in an etching process | Satyadev Patel, Douglas B. MacDonald, Hongqin Shi | 2005-09-13 |
| 6939472 | Etching method in fabrications of microstructures | Hongqin Shi | 2005-09-06 |