Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6969635 | Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates | Satyadev Patel, Andrew Huibers | 2005-11-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6969635 | Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates | Satyadev Patel, Andrew Huibers | 2005-11-29 |