SC

Szu-Ping Chen

TSMC: 1 patents #198 of 851Top 25%
Overall (2005): #94,563 of 245,428Top 40%
1
Patents 2005

Issued Patents 2005

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6838217 Define overlay dummy pattern in mark shielding region to reduce wafer scale error caused by metal deposition Yi-Lin Chen, Chin-Chuan Hsieh 2005-01-04