Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6938510 | Ball screw apparatus | — | 2005-09-06 |
| 6911661 | Electron beam exposure apparatus | Akio Yamada | 2005-06-28 |
| 6903355 | Electron beam exposure apparatus, electron beam method, semiconductor device manufacturing method, mask, and mask manufacturing method | Hiroshi Yasuda, Akio Yamada | 2005-06-07 |