Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6903355 | Electron beam exposure apparatus, electron beam method, semiconductor device manufacturing method, mask, and mask manufacturing method | Akio Yamada, Takayuki Yabe | 2005-06-07 |
| 6850954 | Information retrieval support method and information retrieval support system | Noriaki Kawamae, Terumasa Aoki | 2005-02-01 |