Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6911661 | Electron beam exposure apparatus | Takayuki Yabe | 2005-06-28 |
| 6903355 | Electron beam exposure apparatus, electron beam method, semiconductor device manufacturing method, mask, and mask manufacturing method | Hiroshi Yasuda, Takayuki Yabe | 2005-06-07 |
| 6881968 | Electron beam exposure apparatus, electron beam exposure method, semiconductor device manufacturing method, and electron beam shape measuring method | — | 2005-04-19 |
| 6869319 | Misconnection-proof key and connector using the same | Kazuyuki Ozai, Shinya Ishizuka, Kazuhiro Sato | 2005-03-22 |