Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6867086 | Multi-step deposition and etch back gap fill process | David Chen, Robert Shepherd, George D. Papasouliotis | 2005-03-15 |
| 6846745 | High-density plasma process for filling high aspect ratio structures | George D. Papasouliotis, Raihan M. Tarafdar, Vikram Singh | 2005-01-25 |