Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6846745 | High-density plasma process for filling high aspect ratio structures | George D. Papasouliotis, Vishal Gauri, Vikram Singh | 2005-01-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6846745 | High-density plasma process for filling high aspect ratio structures | George D. Papasouliotis, Vishal Gauri, Vikram Singh | 2005-01-25 |