Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6867086 | Multi-step deposition and etch back gap fill process | Robert Shepherd, Vishal Gauri, George D. Papasouliotis | 2005-03-15 |
| 6855225 | Single-tube interlaced inductively coupling plasma source | Yuh-Jia Su, Vincent Decaux | 2005-02-15 |