Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6954267 | Device for measuring surface defects | Andreas Lang, Michael Schweiger | 2005-10-11 |
| 6935201 | Measurement configuration including a vehicle and method for performing measurements with the measurement configuration at various locations | Eckhard Marx | 2005-08-30 |
| 6891609 | Measurement box with module for measuring wafer characteristics | — | 2005-05-10 |