Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6924455 | Integrated plasma chamber and inductively-coupled toroidal plasma source | Donald K. Smith, William M. Holber | 2005-08-02 |
| 6907167 | Optical interleaving with enhanced spectral response and reduced polarization sensitivity | Hwan J. Jeong | 2005-06-14 |
| 6872909 | Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel | William M. Holber, Andrew Cowe, Matthew Besen, Ronald W. Collins, Jr., Susan C. Trulli +1 more | 2005-03-29 |