Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6932098 | Apparatus and method for pressure fluctuation insensitive mass flow control | Ali Shajii, Nicholas Kottenstette, Jesse E. Ambrosina, William R. Clark | 2005-08-23 |
| 6924455 | Integrated plasma chamber and inductively-coupled toroidal plasma source | Xing Chen, William M. Holber | 2005-08-02 |