Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6924455 | Integrated plasma chamber and inductively-coupled toroidal plasma source | Xing Chen, Donald K. Smith | 2005-08-02 |
| 6887339 | RF power supply with integrated matching network | Daniel Goodman, Andrzej Bortkiewicz, Gary D. Alley, Stephen F. Horne | 2005-05-03 |
| 6872909 | Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel | Xing Chen, Andrew Cowe, Matthew Besen, Ronald W. Collins, Jr., Susan C. Trulli +1 more | 2005-03-29 |