Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6943073 | Process for low temperature atomic layer deposition of RH | Eugene P. Marsh | 2005-09-13 |
| 6881260 | Process for direct deposition of ALD RhO2 | Eugene P. Marsh | 2005-04-19 |
| 6874335 | Large scale synthesis of germanium selenide glass and germanium selenide glass compounds | — | 2005-04-05 |
| 6872420 | Methods for preparing ruthenium and osmium compounds and films | Brian A. Vaartstra | 2005-03-29 |
| 6844261 | Method of forming ruthenium and ruthenium oxide films on a semiconductor structure | Eugene P. Marsh | 2005-01-18 |
| 6840988 | Solvated ruthenium precursors for direct liquid injection of ruthenium and ruthenium oxide | Eugene P. Marsh | 2005-01-11 |