Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979370 | Methods, complexes, and system for forming metal-containing films | — | 2005-12-27 |
| 6967159 | Systems and methods for forming refractory metal nitride layers using organic amines | — | 2005-11-22 |
| 6958300 | Systems and methods for forming metal oxides using metal organo-amines and metal organo-oxides | Donald L. Westmoreland | 2005-10-25 |
| 6872420 | Methods for preparing ruthenium and osmium compounds and films | Stefan Uhlenbrock | 2005-03-29 |
| 6863725 | Method of forming a Ta2O5 comprising layer | Trung T. Doan | 2005-03-08 |
| 6861353 | Methods for planarization of metal-containing surfaces using halogens and halide salts | — | 2005-03-01 |