Issued Patents 2005
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6946395 | Devices containing zirconium-platinum-containing materials and methods for preparing such materials and devices | — | 2005-09-20 |
| 6943073 | Process for low temperature atomic layer deposition of RH | Stefan Uhlenbrock | 2005-09-13 |
| 6903005 | Method for the formation of RuSixOy-containing barrier layers for high-k dielectrics | — | 2005-06-07 |
| 6900107 | Devices containing platinum-iridium films and methods of preparing such films and devices | — | 2005-05-31 |
| 6884691 | Method of forming a substrate having a surface comprising at least one of Pt, Pd, Co and Au in at least one of elemental and alloy forms | — | 2005-04-26 |
| 6881260 | Process for direct deposition of ALD RhO2 | Stefan Uhlenbrock | 2005-04-19 |
| 6867449 | Capacitor having RuSixOy-containing adhesion layers | Brenda D. Kraus | 2005-03-15 |
| 6867093 | Process for fabricating RuSixOy-containing adhesion layers | Brenda D. Kraus | 2005-03-15 |
| 6861355 | Metal plating using seed film | — | 2005-03-01 |
| 6858535 | Methods for patterning metal layers for use with forming semiconductor devices | — | 2005-02-22 |
| 6855928 | Analysis of semiconductor surfaces by secondary ion mass spectrometry and methods | — | 2005-02-15 |
| 6844261 | Method of forming ruthenium and ruthenium oxide films on a semiconductor structure | Stefan Uhlenbrock | 2005-01-18 |
| 6840988 | Solvated ruthenium precursors for direct liquid injection of ruthenium and ruthenium oxide | Stefan Uhlenbrock | 2005-01-11 |