Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6958001 | Carrier assemblies, planarizing apparatuses including carrier assemblies, and methods for planarizing micro-device workpieces | — | 2005-10-25 |
| 6939211 | Planarizing solutions including abrasive elements, and methods for manufacturing and using such planarizing solutions | Theodore M. Taylor | 2005-09-06 |
| 6884144 | Methods and systems for planarizing microelectronic devices with Ge-Se-Ag layers | Theodore M. Taylor | 2005-04-26 |
| 6872132 | Systems and methods for monitoring characteristics of a polishing pad used in polishing micro-device workpieces | Jason B. Elledge | 2005-03-29 |