Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6935929 | Polishing machines including under-pads and methods for mechanical and/or chemical-mechanical polishing of microfeature workpieces | — | 2005-08-30 |
| 6932672 | APPARATUS FOR IN-SITU OPTICAL ENDPOINTING ON WEB-FORMAT PLANARIZING MACHINES IN MECHANICAL OR CHEMICAL-MECHANICAL PLANARIZATION OF MICROELECTRONIC-DEVICE SUBSTRATE ASSEMBLIES AND METHODS FOR MAKING AND USING SAME | — | 2005-08-23 |
| 6929530 | APPARATUS FOR IN-SITU OPTICAL ENDPOINTING ON WEB-FORMAT PLANARIZING MACHINES IN MECHANICAL OR CHEMICAL-MECHANICAL PLANARIZATION OF MICROELECTRONIC-DEVICE SUBSTRATE ASSEMBLIES AND METHODS FOR MAKING AND USING SAME | — | 2005-08-16 |
| 6918301 | Methods and systems to detect defects in an end effector for conditioning polishing pads used in polishing micro-device workpieces | — | 2005-07-19 |
| 6872132 | Systems and methods for monitoring characteristics of a polishing pad used in polishing micro-device workpieces | Nagasubramaniyan Chandrasekaran | 2005-03-29 |