Issued Patents 2005
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6969306 | Apparatus for planarizing microelectronic workpieces | — | 2005-11-29 |
| 6962520 | Retaining rings, planarizing apparatuses including retaining rings, and methods for planarizing micro-device workpieces | — | 2005-11-08 |
| 6939211 | Planarizing solutions including abrasive elements, and methods for manufacturing and using such planarizing solutions | Nagasubramaniyan Chandrasekaran | 2005-09-06 |
| 6900500 | Buried transistors for silicon on insulator technology | Won-joo Kim, John Skrovan | 2005-05-31 |
| 6884144 | Methods and systems for planarizing microelectronic devices with Ge-Se-Ag layers | Nagasubramaniyan Chandrasekaran | 2005-04-26 |
| 6869335 | Retaining rings, planarizing apparatuses including retaining rings, and methods for planarizing micro-device workpieces | — | 2005-03-22 |
| 6866566 | Apparatus and method for conditioning a contact surface of a processing pad used in processing microelectronic workpieces | — | 2005-03-15 |
| 6861309 | Methods of forming spaced conductive regions, and methods of forming capacitor constructions | Nishant Sinha | 2005-03-01 |