Issued Patents 2005
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6960534 | Method for controlling the temperature of a gas distribution plate in a process reactor | Kevin G. Donohoe | 2005-11-01 |
| 6952108 | Methods for fabricating plasma probes | — | 2005-10-04 |
| 6939813 | Apparatus for improved low pressure inductively coupled high density plasma reactor | Kevin G. Donohoe | 2005-09-06 |
| 6916723 | Methods of forming rugged semiconductor-containing surfaces | Shenlin Chen, Trung T. Doan, Lyle Breiner, Er-Xuan Ping | 2005-07-12 |
| 6897070 | Detection of gas phase materials | — | 2005-05-24 |
| 6887755 | Methods of forming rugged silicon-containing surfaces | Lyle Breiner | 2005-05-03 |
| 6884725 | Methods of forming materials within openings, and methods of forming isolation regions | John T. Moore | 2005-04-26 |
| 6875371 | Etchant with selectivity for doped silicon dioxide over undoped silicon dioxide and silicon nitride, processes which employ the etchant, and structures formed thereby | Kei-Yu Ko, Li Li | 2005-04-05 |
| 6858526 | Methods of forming materials between conductive electrical components, and insulating materials | Werner Juengling, Kirk D. Prall, Ravi Iyer, Gurtej S. Sandhu | 2005-02-22 |
| 6841525 | Dilute cleaning composition and method for using same | Max Hineman | 2005-01-11 |