Issued Patents 2005
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6960534 | Method for controlling the temperature of a gas distribution plate in a process reactor | Guy T. Blalock | 2005-11-01 |
| 6958297 | Plasma etching methods | David S. Becker, Bradley J. Howard | 2005-10-25 |
| 6946053 | Plasma reactor | — | 2005-09-20 |
| 6939813 | Apparatus for improved low pressure inductively coupled high density plasma reactor | Guy T. Blalock | 2005-09-06 |
| 6921725 | Etching of high aspect ratio structures | — | 2005-07-26 |
| 6909113 | Three-dimensional photonic band structures in solid materials | Joseph E. Geusic | 2005-06-21 |
| 6890858 | Methods of forming materials over uneven surface topologies, and methods of forming insulative materials over and between conductive lines | Werner Juengling | 2005-05-10 |
| 6890863 | Etchant and method of use | David S. Becker | 2005-05-10 |