Issued Patents 2005
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6964602 | Methods and apparatuses for mechanical and chemical-mechanical planarization of microelectronic-device substrate assemblies on planarizing pads | Scott Meikle | 2005-11-15 |
| 6949011 | Method and apparatus for cleaning a web-based chemical mechanical planarization system | Scott E. Moore | 2005-09-27 |
| 6945855 | Method and apparatus for cleaning a web-based chemical mechanical planarization system | Scott E. Moore | 2005-09-20 |
| 6933232 | Method of reducing oxidation of metal structures by selectively implanting ions through a mask positioned above and not in contact with the substrate | — | 2005-08-23 |
| 6932687 | Planarizing pads for planarization of microelectronic substrates | Vishnu K. Agarwal | 2005-08-23 |
| 6911111 | Inline monitoring of pad loading for CuCMP and developing an endpoint technique for cleaning | Scott Meikle | 2005-06-28 |
| 6881129 | Fixed-abrasive chemical-mechanical planarization of titanium nitride | Gundu M. Sabde | 2005-04-19 |
| 6852618 | Combined barrier layer and seed layer | — | 2005-02-08 |