Issued Patents 2005
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6969297 | Apparatus and method for conditioning and monitoring media used for chemical-mechanical planarization | — | 2005-11-29 |
| 6956538 | RFID material tracking method and apparatus | — | 2005-10-18 |
| 6949011 | Method and apparatus for cleaning a web-based chemical mechanical planarization system | Dinesh Chopra | 2005-09-27 |
| 6945855 | Method and apparatus for cleaning a web-based chemical mechanical planarization system | Dinesh Chopra | 2005-09-20 |
| 6922253 | Planarizing machines and control systems for mechanical and/or chemical-mechanical planarization of microelectronic substrates | — | 2005-07-26 |
| 6921318 | Semiconductor die de-processing using a die holder and chemical mechanical polishing | Bryan Carson | 2005-07-26 |
| 6913519 | Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic substrates | — | 2005-07-05 |
| 6858538 | Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies | Jim Hofmann, Gundu M. Sabde, Stephen J. Kramer | 2005-02-22 |
| 6840840 | Apparatus and method for conditioning and monitoring media used for chemical-mechanical planarization | — | 2005-01-11 |