Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6964602 | Methods and apparatuses for mechanical and chemical-mechanical planarization of microelectronic-device substrate assemblies on planarizing pads | Dinesh Chopra | 2005-11-15 |
| 6913997 | Method of using tantalum-aluminum-nitrogen material as diffusion barrier and adhesion layer in semiconductor devices | Salman Akram | 2005-07-05 |
| 6911111 | Inline monitoring of pad loading for CuCMP and developing an endpoint technique for cleaning | Dinesh Chopra | 2005-06-28 |
| 6890591 | Polishing pads and planarizing machines for mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies, and methods for making and using such pads and machines | Vishnu K. Agarwal | 2005-05-10 |
| 6867448 | Electro-mechanically polished structure | Whonchee Lee | 2005-03-15 |
| 6838382 | Method and apparatus for forming a planarizing pad having a film and texture elements for planarization of microelectronic substrates | — | 2005-01-04 |