Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6934410 | Mask correction for photolithographic processes | Marina Medvedeva, Eugeni E. Egorov, Gennady V. Belokopytov, Paul G. Filseth | 2005-08-23 |
| 6911285 | Sidelobe correction for attenuated phase shift masks | Marina Medvedeva, Sergei Rodin | 2005-06-28 |
| 6898780 | Method and system for constructing a hierarchy-driven chip covering for optical proximity correction | Evgueny E. Egorov, Ranko Scepanovic | 2005-05-24 |
| 6854104 | First approximation for OPC significant speed-up | Marina Medvedeva, Jaroslav Kalinin, Sergel Rodin | 2005-02-08 |