Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6934410 | Mask correction for photolithographic processes | Stanislav V. Aleshin, Eugeni E. Egorov, Gennady V. Belokopytov, Paul G. Filseth | 2005-08-23 |
| 6911285 | Sidelobe correction for attenuated phase shift masks | Stanislav V. Aleshin, Sergei Rodin | 2005-06-28 |
| 6854104 | First approximation for OPC significant speed-up | Stanislav V. Aleshin, Jaroslav Kalinin, Sergel Rodin | 2005-02-08 |