Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6911285 | Sidelobe correction for attenuated phase shift masks | Stanislav V. Aleshin, Marina Medvedeva | 2005-06-28 |
SR
Sergei Rodin
Overall (2005): #104,555 of 245,428Top 45%
1
Patents 2005