Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6949020 | Methods for making reinforced wafer polishing pads and apparatuses implementing the same | Cangshan Xu, Fen Dai | 2005-09-27 |
| 6939207 | Method and apparatus for controlling CMP pad surface finish | Alan J. Jensen, Mario Stella, Peter Renteln, Jeffrey Farber | 2005-09-06 |