Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6953391 | Methods for reducing slurry usage in a linear chemical mechanical planarization system | Sabir A. Majumder, Zhefei J. Chen | 2005-10-11 |
| 6949020 | Methods for making reinforced wafer polishing pads and apparatuses implementing the same | Eugene Zhao, Fen Dai | 2005-09-27 |
| 6930782 | End point detection with imaging matching in semiconductor processing | Jingang Yi | 2005-08-16 |
| 6931330 | Methods for monitoring and controlling chemical mechanical planarization | Jingang Yi | 2005-08-16 |